MEMS/NEMS switches are used in a variety of portable electronics and RF telecommunications systems. MEMS/NEMS switches are ideally bi-stable, with one ON and one OFF state and a reliable switching between the two induced by electrical actuation. Presented herein is an exploration into non-ideal behavior, i.e. tri-stability, and parametric sensitivity of a generalization of cantilever MEMS/NEMS switches. The representative system model employs multiphysics features based on Euler–Bernoulli beam theory, parallel plate capacitance for electrostatics, and a Lennard-Jones form of surface interaction. The geometry, material properties, and surface features of the device are condensed into just a few dimensionless quantities, creating a parameter space of low enough dimensionality to provide accessible representations of all system equilibria within physically relevant ranges. Analysis of this system model offers insight regarding conditions necessary for bi- and tri-stability in such systems, which are crucial for informing studies on switching dynamics and various device performance metrics.

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parametric sensitivity geometry material properties rf telecommunications systems memsnems switches parameter system model lennardjones form of surface various device performance portable electronics electrostatics nonideal behavior ie tristability informing studies on switching dynamics electrical multiphysics features eulerbernoulli beam theory parallel plate capacitance

Anil Bajaj, Arvind Raman,Devin Kalafut,.Multistability of cantilever MEMS/NEMS switches induced by electrostatic and surface forces. 95 (0),.

Anil Bajaj, Arvind Raman,Devin Kalafut,"Multistability of cantilever MEMS/NEMS switches induced by electrostatic and surface forces" 95

Anil Bajaj, Arvind Raman,Devin Kalafut,"Multistability of cantilever MEMS/NEMS switches induced by electrostatic and surface forces"